{"viewingHint":"paged","attribution":"Universit\u00e4ts- und Landesbibliothek","service":[],"structures":[],"label":"Entwicklung von gro\u00dffl\u00e4chigen PECVD-Prozessen zur kontrollierten, homogenen Abscheidung d\u00fcnner Siliziumschichten f\u00fcr die Photovoltaik","logo":{"@id":"https://danrw.test.vls.io/domainresource/static/graphics/connectors/viewerLogo.gif","service":{"profile":"http://iiif.io/api/image/2/level2.json","@context":"http://iiif.io/api/image/2/context.json","@id":"http://www.ulb.uni-bonn.de"}},"@context":"http://iiif.io/api/presentation/2/context.json","metadata":[{"value":"Entwicklung von gro\u00dffl\u00e4chigen PECVD-Prozessen zur kontrollierten, homogenen Abscheidung d\u00fcnner Siliziumschichten f\u00fcr die Photovoltaik / Bj\u00f6rn Olaf Grootoonk","label":"Titel"},{"value":"Grootoonk, Bj\u00f6rn Olaf","label":"Verfasser"},{"value":"J\u00fclich : Forschungszentrum J\u00fclich GmbH, Zentralbibliothek, Verlag, 2019","label":"Erschienen"},{"value":"1 Online-Ressource (154 Seiten)  : Illustrationen, Diagramme","label":"Umfang"},{"value":"RWTH Aachen University, Dissertation, 2018","label":"Hochschulschrift"},{"value":"Englische und deutsche Zusammenfassung","label":"Anmerkung"},{"value":"Schriften des Forschungszentrums J\u00fclich ; Band/volume 462","label":"Serie"},{"value":"10.18154/RWTH-2019-04974","label":"URN"},{"value":"urn:nbn:de:hbz:5:2-197312","label":"URN"}],"@id":"https://danrw.test.vls.io/i3f/v20/60752/manifest","@type":"sc:Manifest","seeAlso":{"format":"application/xml","@id":"https://danrw.test.vls.io/oai?verb=GetRecord&metadataPrefix=mets&identifier=60752","label":"METS"}}